Rigaku Group (Rigaku Holdings Corporation; headquarters: Akishima, Tokyo; CEO: Jun Kawakami; hereinafter “Rigaku”) will exhibit at “SEMICON Japan 2025,” to be held from December 17 to 19, 2025, at Tokyo Big Sight.
SEMICON Japan is an international exhibition for the electronics manufacturing industry, covering semiconductor manufacturing equipment, materials, metrology technologies, automobiles, and IoT devices.

This year’s Rigaku booth will present solutions under four themes: “Advanced Devices,” “Advanced Packaging,” “IoT & Power Devices,” and “Component Technologies.” As part of our efforts to build metrology infrastructure that supports advanced device manufacturing, we will also spotlight our three latest products.
Visitors can enjoy conversations with Rigaku specialists in an open cafe-style space while savoring delicious coffee. On December 18 from 16:00 to 17:00, we will host a Happy Hour featuring beer and wine. We invite you to stop by and join us.
This year’s Rigaku booth will present solutions under four themes: “Advanced Devices,” “Advanced Packaging,” “IoT & Power Devices,” and “Component Technologies.” As part of our efforts to build metrology infrastructure that supports advanced device manufacturing, we will also spotlight our three latest products.
Visitors can enjoy conversations with Rigaku specialists in an open cafe-style space while savoring delicious coffee. On December 18 from 16:00 to 17:00, we will host a Happy Hour featuring beer and wine. We invite you to stop by and join us.
Product Highlights
・XTRAIA MF-3400
The latest model in the series enables nondestructive evaluation of metal film thickness at the nanometer level. Its newly developed X-ray source delivers approximately twice the X-ray intensity, significantly improving wafer measurement throughput. At the booth, visitors can intuitively explore the instrument’s internal structure and observe X-ray irradiation behavior through 3D AR (Augmented Reality).
・XHEMIS TX-3000
Achieves up to six times faster metal contamination analysis, reducing metrology times from one hour to approximately 10 minutes. It also enables the detection of light elements, which has traditionally been difficult with X-ray fluorescence analysis.
・ONYX 3200
Capable of measuring micro-bumps and other fine patterns. By switching between two different X-ray sources, it can analyze a wide range of elements with high precision. The instrument provides optimal measurement methods tailored to specific applications and materials.
SEMICON Japan 2025 – Exhibition Overview
- Dates: December 17 (Wed) to 19 (Fri), 2025
- Venue: Tokyo Big Sight
- Booth Number: S1522 (South Hall)
- Official Website: https://www.semiconjapan.org/en
- Rigaku Special Event Page: https://rigaku.com/resources/events/semiconjapan2025?setLang=english
About the Rigaku Group
Since its establishment in 1951, the engineering professionals of the Rigaku group have been dedicated to benefiting society with leading-edge technologies, notably including its core fields of X-ray and thermal analysis. With a market presence in 136 countries and regions and some 2,000 employees from 9 global operations, Rigaku is a solution partner in industry and research analysis institutes. Our overseas sales ratio has reached approximately 70% while sustaining an exceptionally high market share in Japan. Together with our customers, we continue to develop and grow. As applications expand from semiconductors, electronic materials, batteries, environment, resources,
energy, life science to other high-tech fields, Rigaku realizes innovations “To Improve Our World by Powering New Perspectives.”
For details, please visit: rigaku-holdings.com/english
Press Contact:
Sawa Himeno
Director, Communications Dept., Rigaku Holdings Corporation
prad@rigaku.co.jp